Order 66: Survivors & Victims
The infamous Order 66. Star Wars fans know it as the beginning of the end for the Jedi Order, the start of the Great Jedi Purge, the dawn of the Galactic Empire, and the end of the Clone Wars. Order 66 claimed many Jedi’s lives—from Jedi Masters and Jedi Knights to Padawans and Younglings. But what was Order 66 exactly? And how many Jedi survived Order 66?
In this guide, we’ll address notable Jedi who survived Order 66 in Legends while highlighting some of the most iconic Order 66 survivors in canon, and everything else you want to know about this polarizing event in the Star Wars universe.
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Order 66 Overview:
- At least 30 Jedi are confirmed to have survived Order 66 in Star Wars canon (with more listed in Legends).
- Thousands of Jedi were killed during the Jedi Purge.
- Why did Anakin kill the Younglings? It was a brutal act of allegiance to Emperor Palpatine and a pivotal step in Anakin’s transformation into Darth Vader.
Scroll down for detailed survivor bios, what happened to the clones, and more Star Wars Order 66 facts.

What Is Order 66?
In the Star Wars universe, Order 66 was the order given to all the clone troopers of the Grand Army of the Republic, which called for executing all Jedi as traitors to the Galactic Republic. The true intent of Order 66 was known only to Chancellor Sheev Palpatine (working in secret as the Sith Lord Darth Sidious) and his co-conspirator Count Dooku (Darth Tyranus). It was the beginning of the “Great Jedi Purge,” intended to wipe out the Jedi Order and institute the reign of the Sith.
To carry out Order 66, Dooku arranged for the cloners on Kamino to implant each clone trooper with a behavioral modification chip. When activated via voice command—“Execute Order 66”—this chip would override the clones’ free will, replacing it with unwavering loyalty to Palpatine and a single mission: eliminate the Jedi.
The Kaminoans believed this was only a failsafe to be used in an emergency against rogue Jedi, but Palpatine manipulated the situation. After several Jedi Masters, led by Mace Windu, moved to arrest him for his secret identity as a Sith, he framed the entire Jedi Order for treason. This public deception gave him the justification to unleash Order 66, turning the Jedi’s own troops against them. Though largely successful, Order 66 wasn’t absolute. There are several known survivors in Star Wars canon, along with additional Jedi who survived Order 66 in Legends.
The first Order 66 scene appears in Star Wars: Episode III — Revenge of the Sith, though substantial context and background are offered in the TV series The Clone Wars. Order 66 was revealed to have been prematurely activated in the Clone Wars timeline due to a malfunctioning chip in the clone trooper “Tup,” who then killed Jedi Master Tiplar. Tup’s friend and fellow clone, “Fives” investigated and nearly uncovered the plot of Order 66. Still, Palpatine framed Fives, and he was eliminated by the Coruscant Guard before he could prove its existence to Anakin Skywalker and Clone Captain Rex.
What Jedi Survived Order 66?
As mentioned, there were Order 66 survivors, including a few of the most important characters in Star Wars lore. While not an exhaustive list, the following are confirmed Jedi who survived Order 66 in current canon:
- Jedi Master Obi-Wan Kenobi
- Jedi Master Yoda
- Ahsoka Tano
- Padawan Caleb Dume (later known as Jedi Knight Kanan Jarrus)
- Padawan Cal Kestis
- Padawan Reva Sevander (later known as The Third Sister)
- The Grand Inquisitor (a Jedi Temple Guard)
- The Seventh Sister
- The Fifth Brother
- Jedi Master Luminara Unduli
- Jedi Master Jocasta Nu
- Jedi Master Kirak Infil’a
- Jedi Master Coleman Kcaj
- Jedi Master Taron Malicos
- Jedi Master Quinlan Vos
- Jedi Master Uvell
- Jedi Knight Cere Junda
- Padawan Ferren Barr
- Padawan Trilla Suduri (later The Second Sister)
- Naq Med
- Zubain Ankonori
- Nuhj
- Masana Tide
- Mususiel
- Ka-Moon Kholi
- Khandra
- Selrahc Eluos
- Grogu
While this might seem like a lot, keep in mind that thousands of Jedi perished as a result of Order 66. So, how many Jedi survived Order 66 in total? The exact number is unknown, but even if more are revealed to have survived, the number will always be comparatively low. Also, we’re primarily sticking to canon in our discussion of Order 66 survivors. Legends had a different list of which Jedi survived Order 66, though there was some overlap, like with Obi-Wan and Yoda.
How Many Jedi Survived Order 66 (Canon)?
It’s impossible to know all the Jedi that survived Order 66. We can only approximate how many Jedi survived Order 66 in canon at any given time. The pulp adventure nature of Star Wars storytelling means that more Jedi survivors could always be revealed, especially as canon expands across shows like Ahsoka, the Tales Of series of animated shorts, and movies like The Mandalorian & Grogu.
The Top 10 Jedi Who Survived Order 66
Which Jedi survived Order 66 and how? While all Order 66 survivors have stories to tell, there are some whose importance to Star Wars canon is indisputable. Read on to learn more details about what Jedi survived Order 66:
1. Obi-Wan Kenobi
Right after defeating the multiple lightsaber-wielding cyborg General Grievous, Obi-Wan Kenobi (at this point having ascended to the rank of Jedi Master and sitting on the Jedi Council) was targeted by clone troopers who had just received Order 66. He was shot off a varactyl while on a cliff, and the clones assumed he died as he descended into water.
But being the great Jedi that he was, Obi-Wan escaped and survived Order 66. With the help of Alderaan Senator Bail Organa (soon to be Leia Organa’s adoptive father), he was able to meet with Master Yoda at the Jedi Temple on Coruscant and broadcast a warning to all Jedi who survived Order 66 at that point, telling them not to come to Coruscant. Unfortunately, many had already fallen.
After dueling Anakin Skywalker (who had become Darth Vader) on Mustafar and leaving him for dead after getting “the high ground,” Obi-Wan fled to Tatooine, where he would live in exile, hiding from The Inquisitorius and watching over Vader’s son, Luke Skywalker, as the galaxy waited for “A New Hope” to come.

2. Yoda
“Judge him not by his size, you should.” Jedi Master Yoda is another important Order 66 survivor. While helping the Wookiees on Kashyyyk during the Clone Wars, Order 66 was executed. Luckily, Yoda sensed the threat of the clones who were poised to shoot him in the back and was able to take them out with the loyal Wookiees, including Chewbacca (later known as Han Solo’s trusted co-pilot), by his side.
He later joined Obi-Wan Kenobi at the Jedi Temple. Following these events, Yoda chose exile on the swampy planet Dagobah, where he successfully evaded the Empire and eventually trained Luke Skywalker to become a Jedi Knight, as seen in Episode V – The Empire Strikes Back.
3. Ahsoka Tano (and Darth Maul)
Perhaps one of Star Wars’ most compelling characters (especially outside of the films), Ahsoka Tano stands out as a key figure who survived Order 66. After helping Bo-Katan Kryze and the Mandalorian resistance during the Siege of Mandalore, Ahsoka and the 332nd Division boarded a Republic starship to Coruscant. They were transporting the renegade Sith lord Darth Maul, known for his iconic double-bladed red lightsaber, who had been arrested by Republic forces after overthrowing the Mandalorian government.
At this moment, Order 66 was enacted, and Ahsoka suddenly found herself dodging blaster bolts from her beloved friend, Clone Commander Rex. Although Ahsoka was technically not a Jedi (nor was Darth Maul), this didn’t stop them from being targeted by the clone troopers. As a former Jedi Padawan and Togruta warrior, Ahsoka’s strength in the Force made her a threat.
As chaos erupted throughout the ship, Ahsoka freed Maul from captivity, hoping his presence would distract the clones. While Maul fought against the clone troopers, Ahsoka was able to apprehend Rex and remove the inhibitor chip from his head. The rest of the clones continued to hunt for Ahsoka, even as their starship began to break apart and fall towards the surface of a nearby moon. Maul escaped via shuttle; Ahsoka and Rex survived the crash and joined the list of those who survived Order 66, though the rest of the 332nd Division perished.
After burying the fallen clones, Ahsoka and Rex faked their deaths and went into hiding. We later meet Ahsoka again in Rebels, The Mandalorian, and her journey continues in the Ahsoka TV series. She’s also remembered for wielding her iconic white lightsabers, symbolizing her independence from both Jedi and Sith ideologies.
4. Kanan Jarrus (Caleb Dume)
Padawan Caleb Dume, later known as Kanan Jarrus, was on a mission with his master, Depa Billaba, and Clone Force 99 (aka “The Bad Batch”) when Order 66 went into effect. Due to Depa Billaba’s heroic sacrifice, some creative deception by The Bad Batch’s Hunter, and later intervention by the reformed clone “Grey,” Caleb escaped.
After Caleb survived Order 66, he eventually changed his name to Kanan Jarrus and rose to become a Jedi Knight in his own right. We later encounter him in Star Wars Rebels, where he helps ignite the Rebellion and trains young Ezra Bridger in the ways of the Force. As one of the most well-known Jedi who survived Order 66, Kanan’s journey is a powerful example of perseverance and legacy beyond the Jedi Purge.
5. The Grand Inquisitor
Also seen in Star Wars Rebels (and later in the live-action Obi-Wan Kenobi series), the Grand Inquisitor was originally a Jedi Temple Guard during Order 66. Disillusioned by the Jedi Order and its failures, he eventually fell to the Dark Side and joined the Empire.
He went on to lead the Inquisitorius—a group of Dark-Side Force users tasked with hunting down and eliminating any remaining Jedi who survived Order 66. As one of the most powerful Force-wielding agents of the Empire, the Grand Inquisitor played a critical role in extending the Jedi Purge long after the order was first executed.
6. The Seventh Sister
The other members of the Inquisitorius were also Order 66 survivors, being former Jedi who had fallen to the Dark Side. Among them was the otherwise unnamed Seventh Sister, a cunning red lightsaber wielder and prominent Mirialan antagonist in Star Wars Rebels. She was key in carrying out the Grand Inquisitor’s orders, especially when hunting down Ahsoka Tano.
7. The Fifth Brother
Another nameless fallen Jedi who survived Order 66 became known as The Fifth Brother. While there are other important members of the Inquisitorius (including the Second Sister Trilla Suduri from Star Wars Jedi: Fallen Order), the iconic Seventh Sister and Fifth Brother earned their spots on this list due to the menace they brought to Star Wars Rebels.
8. Cal Kestis
Cal Kestis, the protagonist of Jedi: Fallen Order, was a Padawan who was saved by the sacrifice of his master, Jaro Topal, allowing him to escape the clone troopers enacting the purge. His story is one of resilience, secrecy, and rediscovery in the wake of the Jedi Purge. Later, he meets Cere Junda, another Order 66 survivor and the former master of Trilla Suduri (the Second Sister), who rescues him from the Inquisitors and helps him reconnect with the Force. Cal Kestis’ distinctive split-hilt saber has become a fan favorite and stands out as a symbol of Jedi resilience after Order 66.
9. Luminara Unduli
After surviving Order 66, Jedi Master Luminara Unduli is captured by the Grand Inquisitor, who tortures and murders her. However, the Empire started rumors of her being alive (and kept her remains) to lure out other Order 66 survivors.
10. Jocasta Nu
The humble librarian of the archives in the Jedi Temple on Coruscant was also one of the Jedi who survived Order 66. She was able to go into hiding after the purge and sought to preserve Jedi knowledge with hopes of training a new generation. However, her efforts were cut short when the Grand Inquisitor and Darth Vader discovered her location and killed her, ending her mission before it could take root.
Who Fell During Order 66?
Many, many Jedi were executed as a result of Order 66. Thousands. It’s impossible to name them all, but victims include prominent members of the Jedi Council, like Ki-Adi-Mundi, Plo Koon, and Shaak Ti.
Several of these tragic deaths are shown or mentioned in The Clone Wars animated series and Revenge of the Sith film. Jedi Masters like Aayla Secura, Stass Allie, and Depa Billaba were betrayed and gunned down by the very clone troopers they once led into battle.
Jedi Master Mace Windu was killed shortly before the execution of Order 66 during his confrontation with Darth Sidious (aided by Anakin), further weakening the Jedi Order ahead of its collapse. Count Dooku was also eliminated before Order 66 was enacted. Though instrumental in orchestrating the Clone Wars, Sidious ultimately sacrificed Dooku to clear the path for Anakin to replace him as Sith apprentice.
One could argue that the greatest victim of Order 66 was the galaxy itself. With the Jedi no longer there to maintain balance, the Republic collapsed, and the Sith-controlled Empire rose (to “thunderous applause”). Palpatine, manipulating both sides of the war, seized the moment to declare himself Emperor, realizing his long-standing plan to restore Sith rule.

Which Jedi Survived Order 66 in Legends?
Notable Legends Order 66 survivors include A’Sharad Hett, Kam Solusar, Jax Pavan, and Quinlan Vos, among others. Some of these characters appear in canon as well, but with different fates.
Just like in canon, the number of Order 66 survivors in Legends is small compared to the thousands lost during the Jedi Purge, but their stories remain fan favorites in the extended Star Wars universe.
Did Any Younglings Survive Order 66?
Canonically, we don’t know exactly how many Younglings survived Order 66. However, we know a few Younglings that survived Order 66, including an unnamed Rodian seen in Jedi: Fallen Order. The most famous Youngling survivor of Order 66 is “The Child,” Grogu. Order 66 claimed the lives of many Younglings, though many of whom died at the hands of Anakin Skywalker (who had by that point become Darth Vader).
One of the most chilling moments of the Jedi Temple attack was an act that left fans questioning: How and why did Anakin kill the Younglings? Anakin Skywalker, newly turned Sith apprentice, slaughtered a group of Younglings using his lightsaber. His loyalty to Emperor Palpatine and descent to the Dark Side drove him to commit this heinous act as part of the broader Jedi extermination.
What other Younglings survived Order 66?
Reva Sevander was a Youngling who survived Order 66. Later known as the Third Sister, her firsthand experience of Anakin’s betrayal (and the trauma that followed) shaped her character transformation into an agent of the Inquisitorius.
Were There Any Clones That Disobeyed Order 66?
Yes, the clones of Clone Force 99 (“The Bad Batch”) were able to disobey Order 66 because of their genetic mutations, which caused their biochips to malfunction or have less of an effect, the exception being the clone known as “Crosshair.” Another clone who disobeyed was Captain Rex, who, as previously mentioned, had his biochip removed by Ahsoka Tano and eventually joined the Rebel Alliance.
What Happened to the Clones After Order 66?
The clone troopers who survived the war (ending shortly after) became the first generation of Imperial stormtroopers, enforcing the Emperor’s will over the new Galactic Empire and snuffing out anything that threatened his dominance. These clones became fully obedient because of their biochips, largely losing their independence and free will.
Over time, clone production on Kamino was phased out, replaced by Imperial conscripts and recruits. Still, the legacy of the clones who carried out Order 66—and the few who resisted—remains one of the most complex and tragic chapters in Star Wars history.
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Sources:
- https://starwars.fandom.com/wiki/Order_66
- https://starwars.fandom.com/wiki/Clone_Force_99
- https://starwars.fandom.com/wiki/Great_Jedi_Purge
- https://starwars.fandom.com/wiki/Inquisitorius
- https://starwars.fandom.com/wiki/Second_Sister
- https://starwars.fandom.com/wiki/Clone_trooper
- https://starwars.fandom.com/wiki/Order_66/Legends
- https://collider.com/jedi-who-survived-order-66-and-how/
- https://dorksideoftheforce.com/2021/06/21/how-many-jedi-survived-order-66/
- https://screenrant.com/star-wars-order-66-jedi-survive-canon-who/